Macro Solutions in Micro Dimensions

Microsystems technology expertise in photonics, micro optics and micro fluidics



Regardless of how complex your project is, µInnovaTech will support you flexible and holistic in both current as well as new upcoming microsystem technology projects.

μInnovaTech supports you in integration of micro processing systems in your manufacturing processes, train your staff in the field of laserlithography and processing or assists in planning and implementation of new innovative exposure systems.

µInnovatech is excited to act as an innovative partner at your side in designing new microstructuring concepts involved in new specific development processes.

Project Management

Miniaturization and Smart Systems is not just a trend. In times of dwindling resources and rising global energy consumption are innovative solutions in these areas not only economically feasible, but imperative.

The implementation of such systems requires much experience and multidisciplinary expertise. μInnovaTech offers both. In close cooperation with the customers we conceive devices that require less space and are more cost efficient in function. Examples are micro medical setups representing lab-on-a-chips.

Design · Simulation · Modeling

After creating a design by means of given requirements, simulation and modeling are the next crucial step in any major new development.

In order to test a new innovative concept for a micro optical or a microfluidic element detailed analysis are needed, based on which the element can be prototyped and stepwise improved to the ruling real environmental conditions. This iterative process can be performed at an early stage of developement resulting in saving costs.

μInnovaTech support your R&D team in simulation and modeling of existing designs as well as in the development of completely new concepts in the field of micro system technology.


Rapid prototyping is an efficient way for realization and test of new concepts in their final functionality. With respect to micro optical and microfluidic elements, this is fulfilled in many cases directly after micro structuring of the well chosen photoresist type.

μInnovaTech offers both micro structuring by grayscale and binary exposures in variety of thin and thick photoresist types. Through a simple sketch and specified dimension, microstructures can be offered in single or in array configuration.

Additional services for prototyping include photomask fabrication (binary exposure, amplitude and phase masks) as well as the fabrication of microfluidic elements.


Professional experience

January 2011 - April 2013
Carl Zeiss Jena GmbH

October 1999 - January 2011
Heidelberg Instruments Mikrotechnik GmbH

June - October 1999
Postdoc at the Max-Plank-Institute for nuclear physics


1996 - 1999
PhD thesis: "High resolution measurement of dielectronic recombination of metastable and groundstate Li+ ions"
MPI-K and University of Heidelberg

1991 - 1996
Working as a research assistant in the plasma physics group at the Institute of Applied Physics
University of Heidelberg

See Orcid, Google Scholar, ResearchGate


Microsystems technology
microstructuring, photomask fabrication, microoptics, microfluidics

laser lithography processes, test and measurement processes, data processing, manufacturing processes

testing and system analysis, data analysis, quality analysis

Standard, confocal, interference, SEM

DirectWrite Laserlithography
Photomask, polymer exposure, binary (2D) and grayscale (quasi-3D) microstructuring

Alignment Procedures for Overlay exposures


Programming Skills
VB, Lisp, Matlab Simulink, R, Scripting and OOP

Operating Systems
OS9, Linux and Unix, MS-Windows


Phone: +49 40 22 86 88 90

Responsible for the content:
Dr. Amir Ahmad Saghiri

Copyright © 2014 - 2021 · A.A. Saghiri - µIT InnovaTech · All rights reserved.

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